2/25/2012	9:16:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/25/2012	9:16:36 AM	Recipe started at 9:16 AM
2/25/2012	9:16:36 AM	Helium valve closed
2/25/2012	9:16:36 AM	H2 valve closed
2/25/2012	9:16:36 AM	BCl3 valve closed
2/25/2012	9:16:36 AM	PH3 valve closed
2/25/2012	9:16:36 AM	SiCl4 pre valve closed
2/25/2012	9:16:36 AM	SiCl4 post valve closed
2/25/2012	9:16:36 AM	Main Vac valve closed
2/25/2012	9:16:36 AM	Bubbler valve closed
2/25/2012	9:16:36 AM	Bypass valve opened
2/25/2012	9:16:36 AM	Helium MFC set to  0.000000
2/25/2012	9:16:36 AM	H2 MFC set to  0.000000
2/25/2012	9:16:36 AM	BCl3 MFC set to  0.000000
2/25/2012	9:16:36 AM	PH3 MFC set to  0.000000
2/25/2012	9:16:36 AM	SiCl4 MFC set to  0.000000
2/25/2012	9:16:36 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	9:16:36 AM	Tube furnace set to 0
2/25/2012	9:16:36 AM	Helium valve closed
2/25/2012	9:16:36 AM	H2 valve closed
2/25/2012	9:16:36 AM	BCl3 valve closed
2/25/2012	9:16:36 AM	PH3 valve closed
2/25/2012	9:16:36 AM	SiCl4 pre valve closed
2/25/2012	9:16:36 AM	SiCl4 post valve closed
2/25/2012	9:16:36 AM	Main Vac valve closed
2/25/2012	9:16:36 AM	Bubbler valve closed
2/25/2012	9:16:36 AM	Bypass valve opened
2/25/2012	9:16:36 AM	Helium MFC set to  0.000000
2/25/2012	9:16:36 AM	H2 MFC set to  0.000000
2/25/2012	9:16:36 AM	BCl3 MFC set to  0.000000
2/25/2012	9:16:36 AM	PH3 MFC set to  0.000000
2/25/2012	9:16:36 AM	SiCl4 MFC set to  0.000000
2/25/2012	9:16:36 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	9:16:36 AM	Tube furnace set to 0
2/25/2012	9:16:41 AM	Helium valve closed
2/25/2012	9:16:41 AM	H2 valve closed
2/25/2012	9:16:41 AM	BCl3 valve closed
2/25/2012	9:16:41 AM	PH3 valve closed
2/25/2012	9:16:41 AM	SiCl4 pre valve closed
2/25/2012	9:16:41 AM	SiCl4 post valve closed
2/25/2012	9:16:41 AM	Bypass valve closed
2/25/2012	9:16:41 AM	Bubbler valve closed
2/25/2012	9:16:41 AM	Main Vac valve opened
2/25/2012	9:16:41 AM	Helium MFC set to  0.000000
2/25/2012	9:16:41 AM	H2 MFC set to  0.000000
2/25/2012	9:16:41 AM	BCl3 MFC set to  0.000000
2/25/2012	9:16:41 AM	PH3 MFC set to  0.000000
2/25/2012	9:16:41 AM	SiCl4 MFC set to  0.000000
2/25/2012	9:16:41 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	9:16:42 AM	Tube furnace set to 0
2/25/2012	9:16:42 AM	Run aborted at 9:16 AM
2/25/2012	9:16:42 AM	Helium valve closed
2/25/2012	9:16:42 AM	H2 valve closed
2/25/2012	9:16:42 AM	BCl3 valve closed
2/25/2012	9:16:42 AM	PH3 valve closed
2/25/2012	9:16:42 AM	SiCl4 pre valve closed
2/25/2012	9:16:42 AM	SiCl4 post valve closed
2/25/2012	9:16:42 AM	Bypass valve closed
2/25/2012	9:16:42 AM	Main Vac valve closed
2/25/2012	9:16:42 AM	Bubbler valve closed
2/25/2012	9:16:42 AM	Helium MFC set to  0.000000
2/25/2012	9:16:42 AM	H2 MFC set to  0.000000
2/25/2012	9:16:42 AM	BCl3 MFC set to  0.000000
2/25/2012	9:16:42 AM	PH3 MFC set to  0.000000
2/25/2012	9:16:42 AM	SiCl4 MFC set to  0.000000
2/25/2012	9:16:43 AM	Tube furnace set to 0
2/25/2012	9:16:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/25/2012	9:16:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	9:16:59 AM	Recipe started at 9:16 AM
2/25/2012	9:16:59 AM	Helium valve closed
2/25/2012	9:16:59 AM	H2 valve closed
2/25/2012	9:16:59 AM	BCl3 valve closed
2/25/2012	9:16:59 AM	PH3 valve closed
2/25/2012	9:16:59 AM	SiCl4 pre valve closed
2/25/2012	9:16:59 AM	SiCl4 post valve closed
2/25/2012	9:16:59 AM	Main Vac valve closed
2/25/2012	9:16:59 AM	Bypass valve closed
2/25/2012	9:16:59 AM	Bubbler valve closed
2/25/2012	9:16:59 AM	Helium MFC set to  0.000000
2/25/2012	9:16:59 AM	H2 MFC set to  0.000000
2/25/2012	9:16:59 AM	BCl3 MFC set to  0.000000
2/25/2012	9:16:59 AM	PH3 MFC set to  0.000000
2/25/2012	9:16:59 AM	SiCl4 MFC set to  0.000000
2/25/2012	9:16:59 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	9:16:59 AM	Tube furnace set to 0
2/25/2012	9:17:02 AM	H2 valve closed
2/25/2012	9:17:02 AM	BCl3 valve closed
2/25/2012	9:17:02 AM	PH3 valve closed
2/25/2012	9:17:02 AM	SiCl4 pre valve closed
2/25/2012	9:17:02 AM	SiCl4 post valve closed
2/25/2012	9:17:02 AM	Main Vac valve closed
2/25/2012	9:17:02 AM	Bypass valve closed
2/25/2012	9:17:02 AM	Bubbler valve closed
2/25/2012	9:17:02 AM	Helium valve opened
2/25/2012	9:17:02 AM	Helium MFC set to  500.000000
2/25/2012	9:17:02 AM	H2 MFC set to  0.000000
2/25/2012	9:17:02 AM	BCl3 MFC set to  0.000000
2/25/2012	9:17:02 AM	PH3 MFC set to  0.000000
2/25/2012	9:17:02 AM	SiCl4 MFC set to  0.000000
2/25/2012	9:17:02 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	9:17:02 AM	Tube furnace set to 0
2/25/2012	9:18:07 AM	Helium valve closed
2/25/2012	9:18:07 AM	H2 valve closed
2/25/2012	9:18:07 AM	BCl3 valve closed
2/25/2012	9:18:07 AM	PH3 valve closed
2/25/2012	9:18:07 AM	SiCl4 pre valve closed
2/25/2012	9:18:07 AM	SiCl4 post valve closed
2/25/2012	9:18:07 AM	Main Vac valve closed
2/25/2012	9:18:07 AM	Bypass valve closed
2/25/2012	9:18:07 AM	Bubbler valve closed
2/25/2012	9:18:07 AM	Helium MFC set to  0.000000
2/25/2012	9:18:07 AM	H2 MFC set to  0.000000
2/25/2012	9:18:07 AM	BCl3 MFC set to  0.000000
2/25/2012	9:18:07 AM	PH3 MFC set to  0.000000
2/25/2012	9:18:07 AM	SiCl4 MFC set to  0.000000
2/25/2012	9:18:07 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	9:18:07 AM	Tube furnace set to 0
2/25/2012	9:18:08 AM	Run finished at 9:18 AM
2/25/2012	9:18:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	9:26:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/25/2012	9:26:08 AM	Recipe started at 9:26 AM
2/25/2012	9:26:08 AM	Helium valve closed
2/25/2012	9:26:08 AM	H2 valve closed
2/25/2012	9:26:08 AM	BCl3 valve closed
2/25/2012	9:26:08 AM	PH3 valve closed
2/25/2012	9:26:08 AM	SiCl4 pre valve closed
2/25/2012	9:26:08 AM	SiCl4 post valve closed
2/25/2012	9:26:08 AM	Main Vac valve closed
2/25/2012	9:26:08 AM	Bubbler valve closed
2/25/2012	9:26:08 AM	Bypass valve opened
2/25/2012	9:26:08 AM	Helium MFC set to  0.000000
2/25/2012	9:26:08 AM	H2 MFC set to  0.000000
2/25/2012	9:26:08 AM	BCl3 MFC set to  0.000000
2/25/2012	9:26:08 AM	PH3 MFC set to  0.000000
2/25/2012	9:26:08 AM	SiCl4 MFC set to  0.000000
2/25/2012	9:26:08 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	9:26:08 AM	Tube furnace set to 0
2/25/2012	9:27:10 AM	Helium valve closed
2/25/2012	9:27:10 AM	H2 valve closed
2/25/2012	9:27:10 AM	BCl3 valve closed
2/25/2012	9:27:10 AM	PH3 valve closed
2/25/2012	9:27:10 AM	SiCl4 pre valve closed
2/25/2012	9:27:10 AM	SiCl4 post valve closed
2/25/2012	9:27:10 AM	Main Vac valve closed
2/25/2012	9:27:10 AM	Bubbler valve closed
2/25/2012	9:27:10 AM	Bypass valve opened
2/25/2012	9:27:10 AM	Helium MFC set to  0.000000
2/25/2012	9:27:10 AM	H2 MFC set to  0.000000
2/25/2012	9:27:10 AM	BCl3 MFC set to  0.000000
2/25/2012	9:27:10 AM	PH3 MFC set to  0.000000
2/25/2012	9:27:10 AM	SiCl4 MFC set to  0.000000
2/25/2012	9:27:10 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	9:27:10 AM	Tube furnace set to 0
2/25/2012	9:28:10 AM	Helium valve closed
2/25/2012	9:28:10 AM	H2 valve closed
2/25/2012	9:28:10 AM	BCl3 valve closed
2/25/2012	9:28:10 AM	PH3 valve closed
2/25/2012	9:28:10 AM	SiCl4 pre valve closed
2/25/2012	9:28:10 AM	SiCl4 post valve closed
2/25/2012	9:28:10 AM	Bypass valve closed
2/25/2012	9:28:10 AM	Bubbler valve closed
2/25/2012	9:28:10 AM	Main Vac valve opened
2/25/2012	9:28:10 AM	Helium MFC set to  0.000000
2/25/2012	9:28:10 AM	H2 MFC set to  0.000000
2/25/2012	9:28:10 AM	BCl3 MFC set to  0.000000
2/25/2012	9:28:10 AM	PH3 MFC set to  0.000000
2/25/2012	9:28:10 AM	SiCl4 MFC set to  0.000000
2/25/2012	9:28:10 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	9:28:10 AM	Tube furnace set to 0
2/25/2012	9:28:11 AM	Run finished at 9:28 AM
2/25/2012	9:28:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/25/2012	11:19:24 AM	Main Vac valve closed
2/25/2012	11:19:41 AM	Main Vac valve opened
2/25/2012	11:20:50 AM	Recipe started at 11:20 AM
2/25/2012	11:20:50 AM	Helium valve closed
2/25/2012	11:20:50 AM	H2 valve closed
2/25/2012	11:20:50 AM	BCl3 valve closed
2/25/2012	11:20:50 AM	PH3 valve closed
2/25/2012	11:20:50 AM	SiCl4 pre valve closed
2/25/2012	11:20:50 AM	SiCl4 post valve closed
2/25/2012	11:20:50 AM	Main Vac valve closed
2/25/2012	11:20:50 AM	Bypass valve closed
2/25/2012	11:20:50 AM	Bubbler valve closed
2/25/2012	11:20:50 AM	Helium MFC set to  0.000000
2/25/2012	11:20:50 AM	H2 MFC set to  0.000000
2/25/2012	11:20:50 AM	BCl3 MFC set to  0.000000
2/25/2012	11:20:50 AM	PH3 MFC set to  0.000000
2/25/2012	11:20:50 AM	SiCl4 MFC set to  0.000000
2/25/2012	11:20:50 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:20:51 AM	Tube furnace set to 0
2/25/2012	11:20:54 AM	Helium valve closed
2/25/2012	11:20:54 AM	BCl3 valve closed
2/25/2012	11:20:54 AM	PH3 valve closed
2/25/2012	11:20:54 AM	SiCl4 pre valve closed
2/25/2012	11:20:54 AM	SiCl4 post valve closed
2/25/2012	11:20:54 AM	Main Vac valve closed
2/25/2012	11:20:54 AM	Bypass valve closed
2/25/2012	11:20:54 AM	Bubbler valve closed
2/25/2012	11:20:54 AM	H2 valve opened
2/25/2012	11:20:54 AM	Helium MFC set to  0.000000
2/25/2012	11:20:54 AM	H2 MFC set to  500.000000
2/25/2012	11:20:54 AM	BCl3 MFC set to  0.000000
2/25/2012	11:20:54 AM	PH3 MFC set to  0.000000
2/25/2012	11:20:54 AM	SiCl4 MFC set to  0.000000
2/25/2012	11:20:54 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:20:54 AM	Tube furnace set to 0
2/25/2012	11:22:01 AM	Helium valve closed
2/25/2012	11:22:01 AM	BCl3 valve closed
2/25/2012	11:22:01 AM	PH3 valve closed
2/25/2012	11:22:01 AM	SiCl4 pre valve closed
2/25/2012	11:22:01 AM	SiCl4 post valve closed
2/25/2012	11:22:01 AM	Main Vac valve closed
2/25/2012	11:22:01 AM	Bypass valve closed
2/25/2012	11:22:01 AM	H2 valve opened
2/25/2012	11:22:01 AM	Bubbler valve opened
2/25/2012	11:22:01 AM	Helium MFC set to  0.000000
2/25/2012	11:22:01 AM	H2 MFC set to  500.000000
2/25/2012	11:22:01 AM	BCl3 MFC set to  0.000000
2/25/2012	11:22:01 AM	PH3 MFC set to  0.000000
2/25/2012	11:22:01 AM	SiCl4 MFC set to  0.000000
2/25/2012	11:22:01 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:22:01 AM	Tube furnace set to 0
2/25/2012	11:22:02 AM	Helium valve closed
2/25/2012	11:22:02 AM	BCl3 valve closed
2/25/2012	11:22:02 AM	PH3 valve closed
2/25/2012	11:22:02 AM	SiCl4 pre valve closed
2/25/2012	11:22:03 AM	SiCl4 post valve closed
2/25/2012	11:22:03 AM	Main Vac valve closed
2/25/2012	11:22:03 AM	Bypass valve closed
2/25/2012	11:22:03 AM	H2 valve opened
2/25/2012	11:22:03 AM	Bubbler valve opened
2/25/2012	11:22:03 AM	Helium MFC set to  0.000000
2/25/2012	11:22:03 AM	H2 MFC set to  500.000000
2/25/2012	11:22:03 AM	BCl3 MFC set to  0.000000
2/25/2012	11:22:03 AM	PH3 MFC set to  0.000000
2/25/2012	11:22:03 AM	SiCl4 MFC set to  0.000000
2/25/2012	11:22:03 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:22:03 AM	Tube furnace set to 1000
2/25/2012	11:47:03 AM	Helium valve closed
2/25/2012	11:47:03 AM	PH3 valve closed
2/25/2012	11:47:03 AM	Main Vac valve closed
2/25/2012	11:47:03 AM	Bypass valve closed
2/25/2012	11:47:03 AM	H2 valve opened
2/25/2012	11:47:03 AM	BCl3 valve opened
2/25/2012	11:47:03 AM	SiCl4 pre valve opened
2/25/2012	11:47:03 AM	SiCl4 post valve opened
2/25/2012	11:47:03 AM	Bubbler valve opened
2/25/2012	11:47:03 AM	Helium MFC set to  0.000000
2/25/2012	11:47:03 AM	H2 MFC set to  450.000000
2/25/2012	11:47:03 AM	BCl3 MFC set to  1.500000
2/25/2012	11:47:03 AM	PH3 MFC set to  0.000000
2/25/2012	11:47:03 AM	SiCl4 MFC set to  50.000000
2/25/2012	11:47:03 AM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:47:03 AM	Tube furnace set to 1000
2/25/2012	12:05:03 PM	Helium valve closed
2/25/2012	12:05:03 PM	BCl3 valve closed
2/25/2012	12:05:03 PM	PH3 valve closed
2/25/2012	12:05:03 PM	SiCl4 pre valve closed
2/25/2012	12:05:03 PM	SiCl4 post valve closed
2/25/2012	12:05:03 PM	Main Vac valve closed
2/25/2012	12:05:03 PM	Bypass valve closed
2/25/2012	12:05:03 PM	H2 valve opened
2/25/2012	12:05:03 PM	Bubbler valve opened
2/25/2012	12:05:03 PM	Helium MFC set to  0.000000
2/25/2012	12:05:03 PM	H2 MFC set to  500.000000
2/25/2012	12:05:03 PM	BCl3 MFC set to  0.000000
2/25/2012	12:05:03 PM	PH3 MFC set to  0.000000
2/25/2012	12:05:03 PM	SiCl4 MFC set to  0.000000
2/25/2012	12:05:03 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	12:05:03 PM	Tube furnace set to 750
2/25/2012	12:20:03 PM	H2 valve closed
2/25/2012	12:20:03 PM	BCl3 valve closed
2/25/2012	12:20:03 PM	PH3 valve closed
2/25/2012	12:20:03 PM	SiCl4 pre valve closed
2/25/2012	12:20:03 PM	SiCl4 post valve closed
2/25/2012	12:20:03 PM	Main Vac valve closed
2/25/2012	12:20:03 PM	Bypass valve closed
2/25/2012	12:20:03 PM	Helium valve opened
2/25/2012	12:20:03 PM	Bubbler valve opened
2/25/2012	12:20:03 PM	Helium MFC set to  500.000000
2/25/2012	12:20:03 PM	H2 MFC set to  0.000000
2/25/2012	12:20:03 PM	BCl3 MFC set to  0.000000
2/25/2012	12:20:03 PM	PH3 MFC set to  0.000000
2/25/2012	12:20:03 PM	SiCl4 MFC set to  0.000000
2/25/2012	12:20:03 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	12:20:03 PM	Tube furnace set to 0
2/25/2012	12:40:03 PM	Helium valve closed
2/25/2012	12:40:03 PM	H2 valve closed
2/25/2012	12:40:03 PM	BCl3 valve closed
2/25/2012	12:40:03 PM	PH3 valve closed
2/25/2012	12:40:03 PM	SiCl4 pre valve closed
2/25/2012	12:40:03 PM	SiCl4 post valve closed
2/25/2012	12:40:03 PM	Main Vac valve closed
2/25/2012	12:40:03 PM	Bypass valve closed
2/25/2012	12:40:03 PM	Bubbler valve closed
2/25/2012	12:40:03 PM	Helium MFC set to  0.000000
2/25/2012	12:40:03 PM	H2 MFC set to  0.000000
2/25/2012	12:40:03 PM	BCl3 MFC set to  0.000000
2/25/2012	12:40:03 PM	PH3 MFC set to  0.000000
2/25/2012	12:40:03 PM	SiCl4 MFC set to  0.000000
2/25/2012	12:40:03 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	12:40:03 PM	Tube furnace set to 0
2/25/2012	12:52:39 PM	Run aborted at 12:52 PM
2/25/2012	12:52:39 PM	Helium valve closed
2/25/2012	12:52:39 PM	H2 valve closed
2/25/2012	12:52:39 PM	BCl3 valve closed
2/25/2012	12:52:39 PM	PH3 valve closed
2/25/2012	12:52:39 PM	SiCl4 pre valve closed
2/25/2012	12:52:39 PM	SiCl4 post valve closed
2/25/2012	12:52:39 PM	Bypass valve closed
2/25/2012	12:52:39 PM	Main Vac valve closed
2/25/2012	12:52:39 PM	Bubbler valve closed
2/25/2012	12:52:39 PM	Helium MFC set to  0.000000
2/25/2012	12:52:39 PM	H2 MFC set to  0.000000
2/25/2012	12:52:39 PM	BCl3 MFC set to  0.000000
2/25/2012	12:52:39 PM	PH3 MFC set to  0.000000
2/25/2012	12:52:39 PM	SiCl4 MFC set to  0.000000
2/25/2012	12:52:39 PM	Tube furnace set to 0
2/25/2012	12:52:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	12:52:42 PM	Recipe started at 12:52 PM
2/25/2012	12:52:42 PM	Helium valve closed
2/25/2012	12:52:42 PM	H2 valve closed
2/25/2012	12:52:42 PM	BCl3 valve closed
2/25/2012	12:52:42 PM	PH3 valve closed
2/25/2012	12:52:42 PM	SiCl4 pre valve closed
2/25/2012	12:52:42 PM	SiCl4 post valve closed
2/25/2012	12:52:42 PM	Main Vac valve closed
2/25/2012	12:52:42 PM	Bypass valve closed
2/25/2012	12:52:42 PM	Bubbler valve closed
2/25/2012	12:52:42 PM	Helium MFC set to  0.000000
2/25/2012	12:52:42 PM	H2 MFC set to  0.000000
2/25/2012	12:52:42 PM	BCl3 MFC set to  0.000000
2/25/2012	12:52:42 PM	PH3 MFC set to  0.000000
2/25/2012	12:52:42 PM	SiCl4 MFC set to  0.000000
2/25/2012	12:52:42 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	12:52:42 PM	Tube furnace set to 0
2/25/2012	12:52:45 PM	H2 valve closed
2/25/2012	12:52:45 PM	BCl3 valve closed
2/25/2012	12:52:45 PM	PH3 valve closed
2/25/2012	12:52:45 PM	SiCl4 pre valve closed
2/25/2012	12:52:45 PM	SiCl4 post valve closed
2/25/2012	12:52:45 PM	Main Vac valve closed
2/25/2012	12:52:45 PM	Bypass valve closed
2/25/2012	12:52:45 PM	Bubbler valve closed
2/25/2012	12:52:45 PM	Helium valve opened
2/25/2012	12:52:45 PM	Helium MFC set to  500.000000
2/25/2012	12:52:45 PM	H2 MFC set to  0.000000
2/25/2012	12:52:45 PM	BCl3 MFC set to  0.000000
2/25/2012	12:52:45 PM	PH3 MFC set to  0.000000
2/25/2012	12:52:45 PM	SiCl4 MFC set to  0.000000
2/25/2012	12:52:45 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	12:52:46 PM	Tube furnace set to 0
2/25/2012	12:52:51 PM	Helium valve closed
2/25/2012	12:52:51 PM	H2 valve closed
2/25/2012	12:52:51 PM	BCl3 valve closed
2/25/2012	12:52:51 PM	PH3 valve closed
2/25/2012	12:52:51 PM	SiCl4 pre valve closed
2/25/2012	12:52:51 PM	SiCl4 post valve closed
2/25/2012	12:52:51 PM	Main Vac valve closed
2/25/2012	12:52:51 PM	Bypass valve closed
2/25/2012	12:52:51 PM	Bubbler valve closed
2/25/2012	12:52:51 PM	Helium MFC set to  0.000000
2/25/2012	12:52:51 PM	H2 MFC set to  0.000000
2/25/2012	12:52:51 PM	BCl3 MFC set to  0.000000
2/25/2012	12:52:51 PM	PH3 MFC set to  0.000000
2/25/2012	12:52:51 PM	SiCl4 MFC set to  0.000000
2/25/2012	12:52:51 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	12:52:51 PM	Tube furnace set to 0
2/25/2012	12:52:52 PM	Run finished at 12:52 PM
2/25/2012	12:52:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	12:58:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/25/2012	12:58:06 PM	Recipe started at 12:58 PM
2/25/2012	12:58:06 PM	Helium valve closed
2/25/2012	12:58:06 PM	H2 valve closed
2/25/2012	12:58:06 PM	BCl3 valve closed
2/25/2012	12:58:06 PM	PH3 valve closed
2/25/2012	12:58:06 PM	SiCl4 pre valve closed
2/25/2012	12:58:06 PM	SiCl4 post valve closed
2/25/2012	12:58:06 PM	Main Vac valve closed
2/25/2012	12:58:06 PM	Bubbler valve closed
2/25/2012	12:58:06 PM	Bypass valve opened
2/25/2012	12:58:06 PM	Helium MFC set to  0.000000
2/25/2012	12:58:06 PM	H2 MFC set to  0.000000
2/25/2012	12:58:06 PM	BCl3 MFC set to  0.000000
2/25/2012	12:58:06 PM	PH3 MFC set to  0.000000
2/25/2012	12:58:06 PM	SiCl4 MFC set to  0.000000
2/25/2012	12:58:06 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	12:58:06 PM	Tube furnace set to 0
2/25/2012	12:59:09 PM	Helium valve closed
2/25/2012	12:59:09 PM	H2 valve closed
2/25/2012	12:59:09 PM	BCl3 valve closed
2/25/2012	12:59:09 PM	PH3 valve closed
2/25/2012	12:59:09 PM	SiCl4 pre valve closed
2/25/2012	12:59:09 PM	SiCl4 post valve closed
2/25/2012	12:59:09 PM	Main Vac valve closed
2/25/2012	12:59:09 PM	Bubbler valve closed
2/25/2012	12:59:09 PM	Bypass valve opened
2/25/2012	12:59:09 PM	Helium MFC set to  0.000000
2/25/2012	12:59:09 PM	H2 MFC set to  0.000000
2/25/2012	12:59:09 PM	BCl3 MFC set to  0.000000
2/25/2012	12:59:09 PM	PH3 MFC set to  0.000000
2/25/2012	12:59:09 PM	SiCl4 MFC set to  0.000000
2/25/2012	12:59:09 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	12:59:09 PM	Tube furnace set to 0
2/25/2012	1:00:09 PM	Helium valve closed
2/25/2012	1:00:09 PM	H2 valve closed
2/25/2012	1:00:09 PM	BCl3 valve closed
2/25/2012	1:00:09 PM	PH3 valve closed
2/25/2012	1:00:09 PM	SiCl4 pre valve closed
2/25/2012	1:00:09 PM	SiCl4 post valve closed
2/25/2012	1:00:09 PM	Bypass valve closed
2/25/2012	1:00:09 PM	Bubbler valve closed
2/25/2012	1:00:09 PM	Main Vac valve opened
2/25/2012	1:00:09 PM	Helium MFC set to  0.000000
2/25/2012	1:00:09 PM	H2 MFC set to  0.000000
2/25/2012	1:00:09 PM	BCl3 MFC set to  0.000000
2/25/2012	1:00:09 PM	PH3 MFC set to  0.000000
2/25/2012	1:00:09 PM	SiCl4 MFC set to  0.000000
2/25/2012	1:00:09 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	1:00:09 PM	Tube furnace set to 0
2/25/2012	1:00:10 PM	Run finished at 1:00 PM
2/25/2012	1:00:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/25/2012	2:33:09 PM	Main Vac valve closed
2/25/2012	2:33:27 PM	Main Vac valve opened
2/25/2012	2:34:34 PM	Recipe started at 2:34 PM
2/25/2012	2:34:34 PM	Helium valve closed
2/25/2012	2:34:34 PM	H2 valve closed
2/25/2012	2:34:34 PM	BCl3 valve closed
2/25/2012	2:34:34 PM	PH3 valve closed
2/25/2012	2:34:34 PM	SiCl4 pre valve closed
2/25/2012	2:34:34 PM	SiCl4 post valve closed
2/25/2012	2:34:34 PM	Main Vac valve closed
2/25/2012	2:34:34 PM	Bypass valve closed
2/25/2012	2:34:34 PM	Bubbler valve closed
2/25/2012	2:34:34 PM	Helium MFC set to  0.000000
2/25/2012	2:34:34 PM	H2 MFC set to  0.000000
2/25/2012	2:34:34 PM	BCl3 MFC set to  0.000000
2/25/2012	2:34:34 PM	PH3 MFC set to  0.000000
2/25/2012	2:34:34 PM	SiCl4 MFC set to  0.000000
2/25/2012	2:34:34 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	2:34:34 PM	Tube furnace set to 0
2/25/2012	2:34:37 PM	Helium valve closed
2/25/2012	2:34:37 PM	BCl3 valve closed
2/25/2012	2:34:37 PM	PH3 valve closed
2/25/2012	2:34:37 PM	SiCl4 pre valve closed
2/25/2012	2:34:37 PM	SiCl4 post valve closed
2/25/2012	2:34:37 PM	Main Vac valve closed
2/25/2012	2:34:37 PM	Bypass valve closed
2/25/2012	2:34:37 PM	Bubbler valve closed
2/25/2012	2:34:37 PM	H2 valve opened
2/25/2012	2:34:37 PM	Helium MFC set to  0.000000
2/25/2012	2:34:37 PM	H2 MFC set to  500.000000
2/25/2012	2:34:37 PM	BCl3 MFC set to  0.000000
2/25/2012	2:34:37 PM	PH3 MFC set to  0.000000
2/25/2012	2:34:37 PM	SiCl4 MFC set to  0.000000
2/25/2012	2:34:37 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	2:34:37 PM	Tube furnace set to 0
2/25/2012	2:35:42 PM	Helium valve closed
2/25/2012	2:35:42 PM	BCl3 valve closed
2/25/2012	2:35:42 PM	PH3 valve closed
2/25/2012	2:35:42 PM	SiCl4 pre valve closed
2/25/2012	2:35:42 PM	SiCl4 post valve closed
2/25/2012	2:35:42 PM	Main Vac valve closed
2/25/2012	2:35:42 PM	Bypass valve closed
2/25/2012	2:35:42 PM	H2 valve opened
2/25/2012	2:35:42 PM	Bubbler valve opened
2/25/2012	2:35:42 PM	Helium MFC set to  0.000000
2/25/2012	2:35:42 PM	H2 MFC set to  500.000000
2/25/2012	2:35:42 PM	BCl3 MFC set to  0.000000
2/25/2012	2:35:42 PM	PH3 MFC set to  0.000000
2/25/2012	2:35:42 PM	SiCl4 MFC set to  0.000000
2/25/2012	2:35:42 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	2:35:43 PM	Tube furnace set to 0
2/25/2012	2:35:44 PM	Helium valve closed
2/25/2012	2:35:44 PM	BCl3 valve closed
2/25/2012	2:35:44 PM	PH3 valve closed
2/25/2012	2:35:44 PM	SiCl4 pre valve closed
2/25/2012	2:35:44 PM	SiCl4 post valve closed
2/25/2012	2:35:44 PM	Main Vac valve closed
2/25/2012	2:35:44 PM	Bypass valve closed
2/25/2012	2:35:44 PM	H2 valve opened
2/25/2012	2:35:44 PM	Bubbler valve opened
2/25/2012	2:35:44 PM	Helium MFC set to  0.000000
2/25/2012	2:35:44 PM	H2 MFC set to  500.000000
2/25/2012	2:35:44 PM	BCl3 MFC set to  0.000000
2/25/2012	2:35:44 PM	PH3 MFC set to  0.000000
2/25/2012	2:35:44 PM	SiCl4 MFC set to  0.000000
2/25/2012	2:35:44 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	2:35:44 PM	Tube furnace set to 1000
2/25/2012	3:00:44 PM	Helium valve closed
2/25/2012	3:00:44 PM	PH3 valve closed
2/25/2012	3:00:44 PM	Main Vac valve closed
2/25/2012	3:00:44 PM	Bypass valve closed
2/25/2012	3:00:44 PM	H2 valve opened
2/25/2012	3:00:44 PM	BCl3 valve opened
2/25/2012	3:00:44 PM	SiCl4 pre valve opened
2/25/2012	3:00:44 PM	SiCl4 post valve opened
2/25/2012	3:00:44 PM	Bubbler valve opened
2/25/2012	3:00:44 PM	Helium MFC set to  0.000000
2/25/2012	3:00:44 PM	H2 MFC set to  450.000000
2/25/2012	3:00:44 PM	BCl3 MFC set to  1.500000
2/25/2012	3:00:44 PM	PH3 MFC set to  0.000000
2/25/2012	3:00:44 PM	SiCl4 MFC set to  50.000000
2/25/2012	3:00:44 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	3:00:44 PM	Tube furnace set to 1000
2/25/2012	3:19:44 PM	Helium valve closed
2/25/2012	3:19:44 PM	BCl3 valve closed
2/25/2012	3:19:44 PM	PH3 valve closed
2/25/2012	3:19:44 PM	SiCl4 pre valve closed
2/25/2012	3:19:44 PM	SiCl4 post valve closed
2/25/2012	3:19:44 PM	Main Vac valve closed
2/25/2012	3:19:44 PM	Bypass valve closed
2/25/2012	3:19:44 PM	H2 valve opened
2/25/2012	3:19:44 PM	Bubbler valve opened
2/25/2012	3:19:44 PM	Helium MFC set to  0.000000
2/25/2012	3:19:44 PM	H2 MFC set to  500.000000
2/25/2012	3:19:44 PM	BCl3 MFC set to  0.000000
2/25/2012	3:19:44 PM	PH3 MFC set to  0.000000
2/25/2012	3:19:44 PM	SiCl4 MFC set to  0.000000
2/25/2012	3:19:44 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	3:19:44 PM	Tube furnace set to 750
2/25/2012	3:34:44 PM	H2 valve closed
2/25/2012	3:34:44 PM	BCl3 valve closed
2/25/2012	3:34:44 PM	PH3 valve closed
2/25/2012	3:34:44 PM	SiCl4 pre valve closed
2/25/2012	3:34:44 PM	SiCl4 post valve closed
2/25/2012	3:34:44 PM	Main Vac valve closed
2/25/2012	3:34:44 PM	Bypass valve closed
2/25/2012	3:34:44 PM	Helium valve opened
2/25/2012	3:34:44 PM	Bubbler valve opened
2/25/2012	3:34:44 PM	Helium MFC set to  500.000000
2/25/2012	3:34:44 PM	H2 MFC set to  0.000000
2/25/2012	3:34:44 PM	BCl3 MFC set to  0.000000
2/25/2012	3:34:44 PM	PH3 MFC set to  0.000000
2/25/2012	3:34:44 PM	SiCl4 MFC set to  0.000000
2/25/2012	3:34:44 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	3:34:44 PM	Tube furnace set to 0
2/25/2012	3:54:44 PM	Helium valve closed
2/25/2012	3:54:44 PM	H2 valve closed
2/25/2012	3:54:44 PM	BCl3 valve closed
2/25/2012	3:54:44 PM	PH3 valve closed
2/25/2012	3:54:44 PM	SiCl4 pre valve closed
2/25/2012	3:54:44 PM	SiCl4 post valve closed
2/25/2012	3:54:44 PM	Main Vac valve closed
2/25/2012	3:54:44 PM	Bypass valve closed
2/25/2012	3:54:44 PM	Bubbler valve closed
2/25/2012	3:54:44 PM	Helium MFC set to  0.000000
2/25/2012	3:54:44 PM	H2 MFC set to  0.000000
2/25/2012	3:54:44 PM	BCl3 MFC set to  0.000000
2/25/2012	3:54:44 PM	PH3 MFC set to  0.000000
2/25/2012	3:54:44 PM	SiCl4 MFC set to  0.000000
2/25/2012	3:54:44 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	3:54:45 PM	Tube furnace set to 0
2/25/2012	4:04:48 PM	Run aborted at 4:04 PM
2/25/2012	4:04:48 PM	Helium valve closed
2/25/2012	4:04:48 PM	H2 valve closed
2/25/2012	4:04:48 PM	BCl3 valve closed
2/25/2012	4:04:48 PM	PH3 valve closed
2/25/2012	4:04:48 PM	SiCl4 pre valve closed
2/25/2012	4:04:48 PM	SiCl4 post valve closed
2/25/2012	4:04:48 PM	Bypass valve closed
2/25/2012	4:04:48 PM	Main Vac valve closed
2/25/2012	4:04:48 PM	Bubbler valve closed
2/25/2012	4:04:48 PM	Helium MFC set to  0.000000
2/25/2012	4:04:48 PM	H2 MFC set to  0.000000
2/25/2012	4:04:48 PM	BCl3 MFC set to  0.000000
2/25/2012	4:04:48 PM	PH3 MFC set to  0.000000
2/25/2012	4:04:48 PM	SiCl4 MFC set to  0.000000
2/25/2012	4:04:48 PM	Tube furnace set to 0
2/25/2012	4:05:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	4:05:11 PM	Recipe started at 4:05 PM
2/25/2012	4:05:11 PM	Helium valve closed
2/25/2012	4:05:11 PM	H2 valve closed
2/25/2012	4:05:11 PM	BCl3 valve closed
2/25/2012	4:05:11 PM	PH3 valve closed
2/25/2012	4:05:11 PM	SiCl4 pre valve closed
2/25/2012	4:05:11 PM	SiCl4 post valve closed
2/25/2012	4:05:11 PM	Main Vac valve closed
2/25/2012	4:05:11 PM	Bypass valve closed
2/25/2012	4:05:11 PM	Bubbler valve closed
2/25/2012	4:05:11 PM	Helium MFC set to  0.000000
2/25/2012	4:05:11 PM	H2 MFC set to  0.000000
2/25/2012	4:05:11 PM	BCl3 MFC set to  0.000000
2/25/2012	4:05:11 PM	PH3 MFC set to  0.000000
2/25/2012	4:05:11 PM	SiCl4 MFC set to  0.000000
2/25/2012	4:05:11 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	4:05:11 PM	Tube furnace set to 0
2/25/2012	4:05:14 PM	H2 valve closed
2/25/2012	4:05:14 PM	BCl3 valve closed
2/25/2012	4:05:14 PM	PH3 valve closed
2/25/2012	4:05:14 PM	SiCl4 pre valve closed
2/25/2012	4:05:14 PM	SiCl4 post valve closed
2/25/2012	4:05:14 PM	Main Vac valve closed
2/25/2012	4:05:14 PM	Bypass valve closed
2/25/2012	4:05:14 PM	Bubbler valve closed
2/25/2012	4:05:14 PM	Helium valve opened
2/25/2012	4:05:14 PM	Helium MFC set to  500.000000
2/25/2012	4:05:14 PM	H2 MFC set to  0.000000
2/25/2012	4:05:14 PM	BCl3 MFC set to  0.000000
2/25/2012	4:05:14 PM	PH3 MFC set to  0.000000
2/25/2012	4:05:14 PM	SiCl4 MFC set to  0.000000
2/25/2012	4:05:14 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	4:05:14 PM	Tube furnace set to 0
2/25/2012	4:05:18 PM	Helium valve closed
2/25/2012	4:05:18 PM	H2 valve closed
2/25/2012	4:05:18 PM	BCl3 valve closed
2/25/2012	4:05:18 PM	PH3 valve closed
2/25/2012	4:05:18 PM	SiCl4 pre valve closed
2/25/2012	4:05:18 PM	SiCl4 post valve closed
2/25/2012	4:05:18 PM	Main Vac valve closed
2/25/2012	4:05:18 PM	Bypass valve closed
2/25/2012	4:05:18 PM	Bubbler valve closed
2/25/2012	4:05:18 PM	Helium MFC set to  0.000000
2/25/2012	4:05:18 PM	H2 MFC set to  0.000000
2/25/2012	4:05:18 PM	BCl3 MFC set to  0.000000
2/25/2012	4:05:18 PM	PH3 MFC set to  0.000000
2/25/2012	4:05:18 PM	SiCl4 MFC set to  0.000000
2/25/2012	4:05:18 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	4:05:19 PM	Tube furnace set to 0
2/25/2012	4:05:20 PM	Run finished at 4:05 PM
2/25/2012	4:05:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	4:11:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/25/2012	4:11:29 PM	Recipe started at 4:11 PM
2/25/2012	4:11:29 PM	Helium valve closed
2/25/2012	4:11:29 PM	H2 valve closed
2/25/2012	4:11:29 PM	BCl3 valve closed
2/25/2012	4:11:29 PM	PH3 valve closed
2/25/2012	4:11:29 PM	SiCl4 pre valve closed
2/25/2012	4:11:29 PM	SiCl4 post valve closed
2/25/2012	4:11:29 PM	Main Vac valve closed
2/25/2012	4:11:29 PM	Bubbler valve closed
2/25/2012	4:11:29 PM	Bypass valve opened
2/25/2012	4:11:29 PM	Helium MFC set to  0.000000
2/25/2012	4:11:29 PM	H2 MFC set to  0.000000
2/25/2012	4:11:29 PM	BCl3 MFC set to  0.000000
2/25/2012	4:11:29 PM	PH3 MFC set to  0.000000
2/25/2012	4:11:29 PM	SiCl4 MFC set to  0.000000
2/25/2012	4:11:29 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	4:11:29 PM	Tube furnace set to 0
2/25/2012	4:12:35 PM	Helium valve closed
2/25/2012	4:12:35 PM	H2 valve closed
2/25/2012	4:12:35 PM	BCl3 valve closed
2/25/2012	4:12:35 PM	PH3 valve closed
2/25/2012	4:12:35 PM	SiCl4 pre valve closed
2/25/2012	4:12:35 PM	SiCl4 post valve closed
2/25/2012	4:12:35 PM	Main Vac valve closed
2/25/2012	4:12:35 PM	Bubbler valve closed
2/25/2012	4:12:35 PM	Bypass valve opened
2/25/2012	4:12:35 PM	Helium MFC set to  0.000000
2/25/2012	4:12:35 PM	H2 MFC set to  0.000000
2/25/2012	4:12:35 PM	BCl3 MFC set to  0.000000
2/25/2012	4:12:35 PM	PH3 MFC set to  0.000000
2/25/2012	4:12:35 PM	SiCl4 MFC set to  0.000000
2/25/2012	4:12:35 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	4:12:35 PM	Tube furnace set to 0
2/25/2012	4:13:35 PM	Helium valve closed
2/25/2012	4:13:35 PM	H2 valve closed
2/25/2012	4:13:35 PM	BCl3 valve closed
2/25/2012	4:13:35 PM	PH3 valve closed
2/25/2012	4:13:35 PM	SiCl4 pre valve closed
2/25/2012	4:13:35 PM	SiCl4 post valve closed
2/25/2012	4:13:35 PM	Bypass valve closed
2/25/2012	4:13:35 PM	Bubbler valve closed
2/25/2012	4:13:35 PM	Main Vac valve opened
2/25/2012	4:13:35 PM	Helium MFC set to  0.000000
2/25/2012	4:13:35 PM	H2 MFC set to  0.000000
2/25/2012	4:13:35 PM	BCl3 MFC set to  0.000000
2/25/2012	4:13:35 PM	PH3 MFC set to  0.000000
2/25/2012	4:13:35 PM	SiCl4 MFC set to  0.000000
2/25/2012	4:13:35 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	4:13:35 PM	Tube furnace set to 0
2/25/2012	4:13:36 PM	Run finished at 4:13 PM
2/25/2012	4:13:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/25/2012	4:15:05 PM	Recipe started at 4:15 PM
2/25/2012	4:15:05 PM	Helium valve closed
2/25/2012	4:15:05 PM	H2 valve closed
2/25/2012	4:15:05 PM	BCl3 valve closed
2/25/2012	4:15:05 PM	PH3 valve closed
2/25/2012	4:15:05 PM	SiCl4 pre valve closed
2/25/2012	4:15:05 PM	SiCl4 post valve closed
2/25/2012	4:15:05 PM	Bypass valve closed
2/25/2012	4:15:05 PM	Bubbler valve closed
2/25/2012	4:15:05 PM	Main Vac valve opened
2/25/2012	4:15:05 PM	Helium MFC set to  0.000000
2/25/2012	4:15:05 PM	H2 MFC set to  0.000000
2/25/2012	4:15:05 PM	BCl3 MFC set to  0.000000
2/25/2012	4:15:05 PM	PH3 MFC set to  0.000000
2/25/2012	4:15:05 PM	SiCl4 MFC set to  0.000000
2/25/2012	4:15:05 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	4:15:05 PM	Tube furnace set to 0
2/25/2012	6:15:05 PM	Helium valve closed
2/25/2012	6:15:05 PM	H2 valve closed
2/25/2012	6:15:05 PM	BCl3 valve closed
2/25/2012	6:15:05 PM	PH3 valve closed
2/25/2012	6:15:05 PM	SiCl4 pre valve closed
2/25/2012	6:15:05 PM	SiCl4 post valve closed
2/25/2012	6:15:05 PM	Main Vac valve closed
2/25/2012	6:15:05 PM	Bypass valve closed
2/25/2012	6:15:05 PM	Bubbler valve closed
2/25/2012	6:15:05 PM	Helium MFC set to  0.000000
2/25/2012	6:15:05 PM	H2 MFC set to  0.000000
2/25/2012	6:15:05 PM	BCl3 MFC set to  0.000000
2/25/2012	6:15:05 PM	PH3 MFC set to  0.000000
2/25/2012	6:15:05 PM	SiCl4 MFC set to  0.000000
2/25/2012	6:15:05 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	6:15:05 PM	Tube furnace set to 0
2/25/2012	6:15:08 PM	Helium valve closed
2/25/2012	6:15:08 PM	BCl3 valve closed
2/25/2012	6:15:08 PM	PH3 valve closed
2/25/2012	6:15:08 PM	SiCl4 pre valve closed
2/25/2012	6:15:08 PM	SiCl4 post valve closed
2/25/2012	6:15:08 PM	Main Vac valve closed
2/25/2012	6:15:08 PM	Bypass valve closed
2/25/2012	6:15:08 PM	Bubbler valve closed
2/25/2012	6:15:08 PM	H2 valve opened
2/25/2012	6:15:08 PM	Helium MFC set to  0.000000
2/25/2012	6:15:08 PM	H2 MFC set to  500.000000
2/25/2012	6:15:08 PM	BCl3 MFC set to  0.000000
2/25/2012	6:15:08 PM	PH3 MFC set to  0.000000
2/25/2012	6:15:08 PM	SiCl4 MFC set to  0.000000
2/25/2012	6:15:08 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	6:15:08 PM	Tube furnace set to 0
2/25/2012	6:16:14 PM	Helium valve closed
2/25/2012	6:16:14 PM	BCl3 valve closed
2/25/2012	6:16:14 PM	PH3 valve closed
2/25/2012	6:16:14 PM	SiCl4 pre valve closed
2/25/2012	6:16:14 PM	SiCl4 post valve closed
2/25/2012	6:16:14 PM	Main Vac valve closed
2/25/2012	6:16:14 PM	Bypass valve closed
2/25/2012	6:16:14 PM	H2 valve opened
2/25/2012	6:16:14 PM	Bubbler valve opened
2/25/2012	6:16:14 PM	Helium MFC set to  0.000000
2/25/2012	6:16:14 PM	H2 MFC set to  500.000000
2/25/2012	6:16:14 PM	BCl3 MFC set to  0.000000
2/25/2012	6:16:14 PM	PH3 MFC set to  0.000000
2/25/2012	6:16:14 PM	SiCl4 MFC set to  0.000000
2/25/2012	6:16:14 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	6:16:14 PM	Tube furnace set to 0
2/25/2012	6:16:16 PM	Helium valve closed
2/25/2012	6:16:16 PM	BCl3 valve closed
2/25/2012	6:16:16 PM	PH3 valve closed
2/25/2012	6:16:16 PM	SiCl4 pre valve closed
2/25/2012	6:16:16 PM	SiCl4 post valve closed
2/25/2012	6:16:16 PM	Main Vac valve closed
2/25/2012	6:16:16 PM	Bypass valve closed
2/25/2012	6:16:16 PM	H2 valve opened
2/25/2012	6:16:16 PM	Bubbler valve opened
2/25/2012	6:16:16 PM	Helium MFC set to  0.000000
2/25/2012	6:16:16 PM	H2 MFC set to  500.000000
2/25/2012	6:16:16 PM	BCl3 MFC set to  0.000000
2/25/2012	6:16:16 PM	PH3 MFC set to  0.000000
2/25/2012	6:16:16 PM	SiCl4 MFC set to  0.000000
2/25/2012	6:16:16 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	6:16:16 PM	Tube furnace set to 1000
2/25/2012	6:41:16 PM	Helium valve closed
2/25/2012	6:41:16 PM	PH3 valve closed
2/25/2012	6:41:16 PM	Main Vac valve closed
2/25/2012	6:41:16 PM	Bypass valve closed
2/25/2012	6:41:16 PM	H2 valve opened
2/25/2012	6:41:16 PM	BCl3 valve opened
2/25/2012	6:41:16 PM	SiCl4 pre valve opened
2/25/2012	6:41:16 PM	SiCl4 post valve opened
2/25/2012	6:41:16 PM	Bubbler valve opened
2/25/2012	6:41:16 PM	Helium MFC set to  0.000000
2/25/2012	6:41:16 PM	H2 MFC set to  450.000000
2/25/2012	6:41:16 PM	BCl3 MFC set to  1.500000
2/25/2012	6:41:16 PM	PH3 MFC set to  0.000000
2/25/2012	6:41:16 PM	SiCl4 MFC set to  50.000000
2/25/2012	6:41:16 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	6:41:16 PM	Tube furnace set to 1000
2/25/2012	7:00:16 PM	Helium valve closed
2/25/2012	7:00:16 PM	BCl3 valve closed
2/25/2012	7:00:16 PM	PH3 valve closed
2/25/2012	7:00:16 PM	SiCl4 pre valve closed
2/25/2012	7:00:16 PM	SiCl4 post valve closed
2/25/2012	7:00:16 PM	Main Vac valve closed
2/25/2012	7:00:16 PM	Bypass valve closed
2/25/2012	7:00:16 PM	H2 valve opened
2/25/2012	7:00:16 PM	Bubbler valve opened
2/25/2012	7:00:16 PM	Helium MFC set to  0.000000
2/25/2012	7:00:16 PM	H2 MFC set to  500.000000
2/25/2012	7:00:16 PM	BCl3 MFC set to  0.000000
2/25/2012	7:00:16 PM	PH3 MFC set to  0.000000
2/25/2012	7:00:16 PM	SiCl4 MFC set to  0.000000
2/25/2012	7:00:16 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	7:00:16 PM	Tube furnace set to 750
2/25/2012	7:15:16 PM	H2 valve closed
2/25/2012	7:15:16 PM	BCl3 valve closed
2/25/2012	7:15:16 PM	PH3 valve closed
2/25/2012	7:15:16 PM	SiCl4 pre valve closed
2/25/2012	7:15:16 PM	SiCl4 post valve closed
2/25/2012	7:15:16 PM	Main Vac valve closed
2/25/2012	7:15:16 PM	Bypass valve closed
2/25/2012	7:15:16 PM	Helium valve opened
2/25/2012	7:15:16 PM	Bubbler valve opened
2/25/2012	7:15:16 PM	Helium MFC set to  500.000000
2/25/2012	7:15:16 PM	H2 MFC set to  0.000000
2/25/2012	7:15:16 PM	BCl3 MFC set to  0.000000
2/25/2012	7:15:16 PM	PH3 MFC set to  0.000000
2/25/2012	7:15:16 PM	SiCl4 MFC set to  0.000000
2/25/2012	7:15:16 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	7:15:16 PM	Tube furnace set to 0
2/25/2012	7:35:16 PM	Helium valve closed
2/25/2012	7:35:16 PM	H2 valve closed
2/25/2012	7:35:16 PM	BCl3 valve closed
2/25/2012	7:35:16 PM	PH3 valve closed
2/25/2012	7:35:16 PM	SiCl4 pre valve closed
2/25/2012	7:35:16 PM	SiCl4 post valve closed
2/25/2012	7:35:16 PM	Main Vac valve closed
2/25/2012	7:35:16 PM	Bypass valve closed
2/25/2012	7:35:16 PM	Bubbler valve closed
2/25/2012	7:35:16 PM	Helium MFC set to  0.000000
2/25/2012	7:35:16 PM	H2 MFC set to  0.000000
2/25/2012	7:35:16 PM	BCl3 MFC set to  0.000000
2/25/2012	7:35:16 PM	PH3 MFC set to  0.000000
2/25/2012	7:35:16 PM	SiCl4 MFC set to  0.000000
2/25/2012	7:35:16 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	7:35:16 PM	Tube furnace set to 0
2/25/2012	7:55:16 PM	Helium valve closed
2/25/2012	7:55:16 PM	H2 valve closed
2/25/2012	7:55:16 PM	BCl3 valve closed
2/25/2012	7:55:16 PM	PH3 valve closed
2/25/2012	7:55:16 PM	SiCl4 pre valve closed
2/25/2012	7:55:16 PM	SiCl4 post valve closed
2/25/2012	7:55:16 PM	Main Vac valve closed
2/25/2012	7:55:16 PM	Bubbler valve closed
2/25/2012	7:55:16 PM	Bypass valve opened
2/25/2012	7:55:16 PM	Helium MFC set to  0.000000
2/25/2012	7:55:16 PM	H2 MFC set to  0.000000
2/25/2012	7:55:16 PM	BCl3 MFC set to  0.000000
2/25/2012	7:55:16 PM	PH3 MFC set to  0.000000
2/25/2012	7:55:16 PM	SiCl4 MFC set to  0.000000
2/25/2012	7:55:16 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	7:55:16 PM	Tube furnace set to 0
2/25/2012	7:56:03 PM	Helium valve closed
2/25/2012	7:56:03 PM	H2 valve closed
2/25/2012	7:56:03 PM	BCl3 valve closed
2/25/2012	7:56:03 PM	PH3 valve closed
2/25/2012	7:56:03 PM	SiCl4 pre valve closed
2/25/2012	7:56:03 PM	SiCl4 post valve closed
2/25/2012	7:56:03 PM	Main Vac valve closed
2/25/2012	7:56:03 PM	Bubbler valve closed
2/25/2012	7:56:03 PM	Bypass valve opened
2/25/2012	7:56:03 PM	Helium MFC set to  0.000000
2/25/2012	7:56:03 PM	H2 MFC set to  0.000000
2/25/2012	7:56:03 PM	BCl3 MFC set to  0.000000
2/25/2012	7:56:03 PM	PH3 MFC set to  0.000000
2/25/2012	7:56:03 PM	SiCl4 MFC set to  0.000000
2/25/2012	7:56:03 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	7:56:03 PM	Tube furnace set to 0
2/25/2012	7:57:04 PM	Helium valve closed
2/25/2012	7:57:04 PM	H2 valve closed
2/25/2012	7:57:04 PM	BCl3 valve closed
2/25/2012	7:57:04 PM	PH3 valve closed
2/25/2012	7:57:04 PM	SiCl4 pre valve closed
2/25/2012	7:57:04 PM	SiCl4 post valve closed
2/25/2012	7:57:04 PM	Bypass valve closed
2/25/2012	7:57:04 PM	Bubbler valve closed
2/25/2012	7:57:04 PM	Main Vac valve opened
2/25/2012	7:57:04 PM	Helium MFC set to  0.000000
2/25/2012	7:57:04 PM	H2 MFC set to  0.000000
2/25/2012	7:57:04 PM	BCl3 MFC set to  0.000000
2/25/2012	7:57:04 PM	PH3 MFC set to  0.000000
2/25/2012	7:57:04 PM	SiCl4 MFC set to  0.000000
2/25/2012	7:57:04 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	7:57:04 PM	Tube furnace set to 0
2/25/2012	7:59:29 PM	Run aborted at 7:59 PM
2/25/2012	7:59:29 PM	Helium valve closed
2/25/2012	7:59:29 PM	H2 valve closed
2/25/2012	7:59:29 PM	BCl3 valve closed
2/25/2012	7:59:29 PM	PH3 valve closed
2/25/2012	7:59:29 PM	SiCl4 pre valve closed
2/25/2012	7:59:29 PM	SiCl4 post valve closed
2/25/2012	7:59:29 PM	Bypass valve closed
2/25/2012	7:59:29 PM	Main Vac valve closed
2/25/2012	7:59:29 PM	Bubbler valve closed
2/25/2012	7:59:29 PM	Helium MFC set to  0.000000
2/25/2012	7:59:29 PM	H2 MFC set to  0.000000
2/25/2012	7:59:29 PM	BCl3 MFC set to  0.000000
2/25/2012	7:59:29 PM	PH3 MFC set to  0.000000
2/25/2012	7:59:29 PM	SiCl4 MFC set to  0.000000
2/25/2012	7:59:30 PM	Tube furnace set to 0
2/25/2012	7:59:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	7:59:33 PM	Recipe started at 7:59 PM
2/25/2012	7:59:33 PM	Helium valve closed
2/25/2012	7:59:33 PM	H2 valve closed
2/25/2012	7:59:33 PM	BCl3 valve closed
2/25/2012	7:59:33 PM	PH3 valve closed
2/25/2012	7:59:33 PM	SiCl4 pre valve closed
2/25/2012	7:59:33 PM	SiCl4 post valve closed
2/25/2012	7:59:33 PM	Main Vac valve closed
2/25/2012	7:59:33 PM	Bypass valve closed
2/25/2012	7:59:33 PM	Bubbler valve closed
2/25/2012	7:59:33 PM	Helium MFC set to  0.000000
2/25/2012	7:59:33 PM	H2 MFC set to  0.000000
2/25/2012	7:59:33 PM	BCl3 MFC set to  0.000000
2/25/2012	7:59:33 PM	PH3 MFC set to  0.000000
2/25/2012	7:59:33 PM	SiCl4 MFC set to  0.000000
2/25/2012	7:59:33 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	7:59:33 PM	Tube furnace set to 0
2/25/2012	7:59:36 PM	H2 valve closed
2/25/2012	7:59:36 PM	BCl3 valve closed
2/25/2012	7:59:36 PM	PH3 valve closed
2/25/2012	7:59:36 PM	SiCl4 pre valve closed
2/25/2012	7:59:36 PM	SiCl4 post valve closed
2/25/2012	7:59:36 PM	Main Vac valve closed
2/25/2012	7:59:36 PM	Bypass valve closed
2/25/2012	7:59:36 PM	Bubbler valve closed
2/25/2012	7:59:36 PM	Helium valve opened
2/25/2012	7:59:36 PM	Helium MFC set to  500.000000
2/25/2012	7:59:36 PM	H2 MFC set to  0.000000
2/25/2012	7:59:36 PM	BCl3 MFC set to  0.000000
2/25/2012	7:59:36 PM	PH3 MFC set to  0.000000
2/25/2012	7:59:36 PM	SiCl4 MFC set to  0.000000
2/25/2012	7:59:36 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	7:59:36 PM	Tube furnace set to 0
2/25/2012	8:00:36 PM	Helium valve closed
2/25/2012	8:00:36 PM	H2 valve closed
2/25/2012	8:00:36 PM	BCl3 valve closed
2/25/2012	8:00:36 PM	PH3 valve closed
2/25/2012	8:00:36 PM	SiCl4 pre valve closed
2/25/2012	8:00:37 PM	SiCl4 post valve closed
2/25/2012	8:00:37 PM	Main Vac valve closed
2/25/2012	8:00:37 PM	Bypass valve closed
2/25/2012	8:00:37 PM	Bubbler valve closed
2/25/2012	8:00:37 PM	Helium MFC set to  0.000000
2/25/2012	8:00:37 PM	H2 MFC set to  0.000000
2/25/2012	8:00:37 PM	BCl3 MFC set to  0.000000
2/25/2012	8:00:37 PM	PH3 MFC set to  0.000000
2/25/2012	8:00:37 PM	SiCl4 MFC set to  0.000000
2/25/2012	8:00:37 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	8:00:37 PM	Tube furnace set to 0
2/25/2012	8:00:38 PM	Run finished at 8:00 PM
2/25/2012	8:00:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	8:04:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	8:04:07 PM	Recipe started at 8:04 PM
2/25/2012	8:04:07 PM	Helium valve closed
2/25/2012	8:04:07 PM	H2 valve closed
2/25/2012	8:04:07 PM	BCl3 valve closed
2/25/2012	8:04:07 PM	PH3 valve closed
2/25/2012	8:04:07 PM	SiCl4 pre valve closed
2/25/2012	8:04:07 PM	SiCl4 post valve closed
2/25/2012	8:04:07 PM	Main Vac valve closed
2/25/2012	8:04:07 PM	Bypass valve closed
2/25/2012	8:04:07 PM	Bubbler valve closed
2/25/2012	8:04:07 PM	Helium MFC set to  0.000000
2/25/2012	8:04:07 PM	H2 MFC set to  0.000000
2/25/2012	8:04:07 PM	BCl3 MFC set to  0.000000
2/25/2012	8:04:07 PM	PH3 MFC set to  0.000000
2/25/2012	8:04:07 PM	SiCl4 MFC set to  0.000000
2/25/2012	8:04:07 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	8:04:07 PM	Tube furnace set to 0
2/25/2012	8:04:10 PM	H2 valve closed
2/25/2012	8:04:10 PM	BCl3 valve closed
2/25/2012	8:04:10 PM	PH3 valve closed
2/25/2012	8:04:10 PM	SiCl4 pre valve closed
2/25/2012	8:04:10 PM	SiCl4 post valve closed
2/25/2012	8:04:10 PM	Main Vac valve closed
2/25/2012	8:04:10 PM	Bypass valve closed
2/25/2012	8:04:10 PM	Bubbler valve closed
2/25/2012	8:04:10 PM	Helium valve opened
2/25/2012	8:04:10 PM	Helium MFC set to  500.000000
2/25/2012	8:04:10 PM	H2 MFC set to  0.000000
2/25/2012	8:04:10 PM	BCl3 MFC set to  0.000000
2/25/2012	8:04:10 PM	PH3 MFC set to  0.000000
2/25/2012	8:04:10 PM	SiCl4 MFC set to  0.000000
2/25/2012	8:04:10 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	8:04:10 PM	Tube furnace set to 0
2/25/2012	8:04:12 PM	Helium valve closed
2/25/2012	8:04:12 PM	H2 valve closed
2/25/2012	8:04:12 PM	BCl3 valve closed
2/25/2012	8:04:12 PM	PH3 valve closed
2/25/2012	8:04:12 PM	SiCl4 pre valve closed
2/25/2012	8:04:12 PM	SiCl4 post valve closed
2/25/2012	8:04:12 PM	Main Vac valve closed
2/25/2012	8:04:12 PM	Bypass valve closed
2/25/2012	8:04:12 PM	Bubbler valve closed
2/25/2012	8:04:12 PM	Helium MFC set to  0.000000
2/25/2012	8:04:12 PM	H2 MFC set to  0.000000
2/25/2012	8:04:12 PM	BCl3 MFC set to  0.000000
2/25/2012	8:04:12 PM	PH3 MFC set to  0.000000
2/25/2012	8:04:12 PM	SiCl4 MFC set to  0.000000
2/25/2012	8:04:12 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	8:04:12 PM	Tube furnace set to 0
2/25/2012	8:04:13 PM	Run finished at 8:04 PM
2/25/2012	8:04:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	8:08:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/25/2012	8:08:30 PM	Recipe started at 8:08 PM
2/25/2012	8:08:30 PM	Helium valve closed
2/25/2012	8:08:30 PM	H2 valve closed
2/25/2012	8:08:30 PM	BCl3 valve closed
2/25/2012	8:08:30 PM	PH3 valve closed
2/25/2012	8:08:30 PM	SiCl4 pre valve closed
2/25/2012	8:08:30 PM	SiCl4 post valve closed
2/25/2012	8:08:30 PM	Main Vac valve closed
2/25/2012	8:08:30 PM	Bubbler valve closed
2/25/2012	8:08:30 PM	Bypass valve opened
2/25/2012	8:08:30 PM	Helium MFC set to  0.000000
2/25/2012	8:08:30 PM	H2 MFC set to  0.000000
2/25/2012	8:08:30 PM	BCl3 MFC set to  0.000000
2/25/2012	8:08:30 PM	PH3 MFC set to  0.000000
2/25/2012	8:08:30 PM	SiCl4 MFC set to  0.000000
2/25/2012	8:08:30 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	8:08:31 PM	Tube furnace set to 0
2/25/2012	8:09:32 PM	Helium valve closed
2/25/2012	8:09:32 PM	H2 valve closed
2/25/2012	8:09:32 PM	BCl3 valve closed
2/25/2012	8:09:32 PM	PH3 valve closed
2/25/2012	8:09:32 PM	SiCl4 pre valve closed
2/25/2012	8:09:32 PM	SiCl4 post valve closed
2/25/2012	8:09:32 PM	Main Vac valve closed
2/25/2012	8:09:32 PM	Bubbler valve closed
2/25/2012	8:09:32 PM	Bypass valve opened
2/25/2012	8:09:32 PM	Helium MFC set to  0.000000
2/25/2012	8:09:32 PM	H2 MFC set to  0.000000
2/25/2012	8:09:32 PM	BCl3 MFC set to  0.000000
2/25/2012	8:09:32 PM	PH3 MFC set to  0.000000
2/25/2012	8:09:32 PM	SiCl4 MFC set to  0.000000
2/25/2012	8:09:32 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	8:09:32 PM	Tube furnace set to 0
2/25/2012	8:10:32 PM	Helium valve closed
2/25/2012	8:10:32 PM	H2 valve closed
2/25/2012	8:10:32 PM	BCl3 valve closed
2/25/2012	8:10:32 PM	PH3 valve closed
2/25/2012	8:10:32 PM	SiCl4 pre valve closed
2/25/2012	8:10:32 PM	SiCl4 post valve closed
2/25/2012	8:10:32 PM	Bypass valve closed
2/25/2012	8:10:32 PM	Bubbler valve closed
2/25/2012	8:10:32 PM	Main Vac valve opened
2/25/2012	8:10:32 PM	Helium MFC set to  0.000000
2/25/2012	8:10:32 PM	H2 MFC set to  0.000000
2/25/2012	8:10:32 PM	BCl3 MFC set to  0.000000
2/25/2012	8:10:32 PM	PH3 MFC set to  0.000000
2/25/2012	8:10:32 PM	SiCl4 MFC set to  0.000000
2/25/2012	8:10:32 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	8:10:32 PM	Tube furnace set to 0
2/25/2012	8:10:33 PM	Run finished at 8:10 PM
2/25/2012	8:10:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/25/2012	8:11:09 PM	Recipe started at 8:11 PM
2/25/2012	8:11:09 PM	Helium valve closed
2/25/2012	8:11:09 PM	H2 valve closed
2/25/2012	8:11:09 PM	BCl3 valve closed
2/25/2012	8:11:09 PM	PH3 valve closed
2/25/2012	8:11:09 PM	SiCl4 pre valve closed
2/25/2012	8:11:09 PM	SiCl4 post valve closed
2/25/2012	8:11:09 PM	Bypass valve closed
2/25/2012	8:11:09 PM	Bubbler valve closed
2/25/2012	8:11:09 PM	Main Vac valve opened
2/25/2012	8:11:09 PM	Helium MFC set to  0.000000
2/25/2012	8:11:09 PM	H2 MFC set to  0.000000
2/25/2012	8:11:09 PM	BCl3 MFC set to  0.000000
2/25/2012	8:11:09 PM	PH3 MFC set to  0.000000
2/25/2012	8:11:09 PM	SiCl4 MFC set to  0.000000
2/25/2012	8:11:09 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	8:11:09 PM	Tube furnace set to 0
2/25/2012	10:11:09 PM	Helium valve closed
2/25/2012	10:11:09 PM	H2 valve closed
2/25/2012	10:11:09 PM	BCl3 valve closed
2/25/2012	10:11:09 PM	PH3 valve closed
2/25/2012	10:11:09 PM	SiCl4 pre valve closed
2/25/2012	10:11:09 PM	SiCl4 post valve closed
2/25/2012	10:11:09 PM	Main Vac valve closed
2/25/2012	10:11:09 PM	Bypass valve closed
2/25/2012	10:11:09 PM	Bubbler valve closed
2/25/2012	10:11:09 PM	Helium MFC set to  0.000000
2/25/2012	10:11:09 PM	H2 MFC set to  0.000000
2/25/2012	10:11:09 PM	BCl3 MFC set to  0.000000
2/25/2012	10:11:09 PM	PH3 MFC set to  0.000000
2/25/2012	10:11:09 PM	SiCl4 MFC set to  0.000000
2/25/2012	10:11:09 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	10:11:10 PM	Tube furnace set to 0
2/25/2012	10:11:13 PM	Helium valve closed
2/25/2012	10:11:13 PM	BCl3 valve closed
2/25/2012	10:11:13 PM	PH3 valve closed
2/25/2012	10:11:13 PM	SiCl4 pre valve closed
2/25/2012	10:11:13 PM	SiCl4 post valve closed
2/25/2012	10:11:13 PM	Main Vac valve closed
2/25/2012	10:11:13 PM	Bypass valve closed
2/25/2012	10:11:13 PM	Bubbler valve closed
2/25/2012	10:11:13 PM	H2 valve opened
2/25/2012	10:11:13 PM	Helium MFC set to  0.000000
2/25/2012	10:11:13 PM	H2 MFC set to  500.000000
2/25/2012	10:11:13 PM	BCl3 MFC set to  0.000000
2/25/2012	10:11:13 PM	PH3 MFC set to  0.000000
2/25/2012	10:11:13 PM	SiCl4 MFC set to  0.000000
2/25/2012	10:11:13 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	10:11:13 PM	Tube furnace set to 0
2/25/2012	10:12:19 PM	Helium valve closed
2/25/2012	10:12:19 PM	BCl3 valve closed
2/25/2012	10:12:19 PM	PH3 valve closed
2/25/2012	10:12:19 PM	SiCl4 pre valve closed
2/25/2012	10:12:19 PM	SiCl4 post valve closed
2/25/2012	10:12:19 PM	Main Vac valve closed
2/25/2012	10:12:19 PM	Bypass valve closed
2/25/2012	10:12:19 PM	H2 valve opened
2/25/2012	10:12:19 PM	Bubbler valve opened
2/25/2012	10:12:19 PM	Helium MFC set to  0.000000
2/25/2012	10:12:19 PM	H2 MFC set to  500.000000
2/25/2012	10:12:19 PM	BCl3 MFC set to  0.000000
2/25/2012	10:12:19 PM	PH3 MFC set to  0.000000
2/25/2012	10:12:19 PM	SiCl4 MFC set to  0.000000
2/25/2012	10:12:19 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	10:12:19 PM	Tube furnace set to 0
2/25/2012	10:12:20 PM	Helium valve closed
2/25/2012	10:12:20 PM	BCl3 valve closed
2/25/2012	10:12:20 PM	PH3 valve closed
2/25/2012	10:12:20 PM	SiCl4 pre valve closed
2/25/2012	10:12:20 PM	SiCl4 post valve closed
2/25/2012	10:12:20 PM	Main Vac valve closed
2/25/2012	10:12:20 PM	Bypass valve closed
2/25/2012	10:12:20 PM	H2 valve opened
2/25/2012	10:12:20 PM	Bubbler valve opened
2/25/2012	10:12:20 PM	Helium MFC set to  0.000000
2/25/2012	10:12:20 PM	H2 MFC set to  500.000000
2/25/2012	10:12:20 PM	BCl3 MFC set to  0.000000
2/25/2012	10:12:20 PM	PH3 MFC set to  0.000000
2/25/2012	10:12:20 PM	SiCl4 MFC set to  0.000000
2/25/2012	10:12:20 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	10:12:20 PM	Tube furnace set to 1000
2/25/2012	10:37:20 PM	Helium valve closed
2/25/2012	10:37:20 PM	PH3 valve closed
2/25/2012	10:37:20 PM	Main Vac valve closed
2/25/2012	10:37:20 PM	Bypass valve closed
2/25/2012	10:37:20 PM	H2 valve opened
2/25/2012	10:37:20 PM	BCl3 valve opened
2/25/2012	10:37:20 PM	SiCl4 pre valve opened
2/25/2012	10:37:20 PM	SiCl4 post valve opened
2/25/2012	10:37:20 PM	Bubbler valve opened
2/25/2012	10:37:20 PM	Helium MFC set to  0.000000
2/25/2012	10:37:20 PM	H2 MFC set to  450.000000
2/25/2012	10:37:20 PM	BCl3 MFC set to  1.500000
2/25/2012	10:37:20 PM	PH3 MFC set to  0.000000
2/25/2012	10:37:20 PM	SiCl4 MFC set to  50.000000
2/25/2012	10:37:20 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	10:37:20 PM	Tube furnace set to 1000
2/25/2012	10:56:20 PM	Helium valve closed
2/25/2012	10:56:20 PM	BCl3 valve closed
2/25/2012	10:56:20 PM	PH3 valve closed
2/25/2012	10:56:20 PM	SiCl4 pre valve closed
2/25/2012	10:56:20 PM	SiCl4 post valve closed
2/25/2012	10:56:20 PM	Main Vac valve closed
2/25/2012	10:56:20 PM	Bypass valve closed
2/25/2012	10:56:20 PM	H2 valve opened
2/25/2012	10:56:20 PM	Bubbler valve opened
2/25/2012	10:56:20 PM	Helium MFC set to  0.000000
2/25/2012	10:56:20 PM	H2 MFC set to  500.000000
2/25/2012	10:56:20 PM	BCl3 MFC set to  0.000000
2/25/2012	10:56:20 PM	PH3 MFC set to  0.000000
2/25/2012	10:56:20 PM	SiCl4 MFC set to  0.000000
2/25/2012	10:56:20 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	10:56:21 PM	Tube furnace set to 750
2/25/2012	11:11:20 PM	H2 valve closed
2/25/2012	11:11:20 PM	BCl3 valve closed
2/25/2012	11:11:20 PM	PH3 valve closed
2/25/2012	11:11:20 PM	SiCl4 pre valve closed
2/25/2012	11:11:20 PM	SiCl4 post valve closed
2/25/2012	11:11:20 PM	Main Vac valve closed
2/25/2012	11:11:20 PM	Bypass valve closed
2/25/2012	11:11:21 PM	Helium valve opened
2/25/2012	11:11:21 PM	Bubbler valve opened
2/25/2012	11:11:21 PM	Helium MFC set to  500.000000
2/25/2012	11:11:21 PM	H2 MFC set to  0.000000
2/25/2012	11:11:21 PM	BCl3 MFC set to  0.000000
2/25/2012	11:11:21 PM	PH3 MFC set to  0.000000
2/25/2012	11:11:21 PM	SiCl4 MFC set to  0.000000
2/25/2012	11:11:21 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:11:21 PM	Tube furnace set to 0
2/25/2012	11:30:00 PM	Run aborted at 11:30 PM
2/25/2012	11:30:00 PM	Helium valve closed
2/25/2012	11:30:00 PM	H2 valve closed
2/25/2012	11:30:00 PM	BCl3 valve closed
2/25/2012	11:30:00 PM	PH3 valve closed
2/25/2012	11:30:00 PM	SiCl4 pre valve closed
2/25/2012	11:30:00 PM	SiCl4 post valve closed
2/25/2012	11:30:00 PM	Bypass valve closed
2/25/2012	11:30:00 PM	Main Vac valve closed
2/25/2012	11:30:00 PM	Bubbler valve closed
2/25/2012	11:30:00 PM	Helium MFC set to  0.000000
2/25/2012	11:30:00 PM	H2 MFC set to  0.000000
2/25/2012	11:30:00 PM	BCl3 MFC set to  0.000000
2/25/2012	11:30:00 PM	PH3 MFC set to  0.000000
2/25/2012	11:30:00 PM	SiCl4 MFC set to  0.000000
2/25/2012	11:30:00 PM	Tube furnace set to 0
2/25/2012	11:30:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	11:30:04 PM	Recipe started at 11:30 PM
2/25/2012	11:30:04 PM	Helium valve closed
2/25/2012	11:30:04 PM	H2 valve closed
2/25/2012	11:30:04 PM	BCl3 valve closed
2/25/2012	11:30:04 PM	PH3 valve closed
2/25/2012	11:30:04 PM	SiCl4 pre valve closed
2/25/2012	11:30:04 PM	SiCl4 post valve closed
2/25/2012	11:30:04 PM	Main Vac valve closed
2/25/2012	11:30:04 PM	Bypass valve closed
2/25/2012	11:30:04 PM	Bubbler valve closed
2/25/2012	11:30:04 PM	Helium MFC set to  0.000000
2/25/2012	11:30:04 PM	H2 MFC set to  0.000000
2/25/2012	11:30:04 PM	BCl3 MFC set to  0.000000
2/25/2012	11:30:04 PM	PH3 MFC set to  0.000000
2/25/2012	11:30:04 PM	SiCl4 MFC set to  0.000000
2/25/2012	11:30:04 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:30:04 PM	Tube furnace set to 0
2/25/2012	11:30:07 PM	H2 valve closed
2/25/2012	11:30:07 PM	BCl3 valve closed
2/25/2012	11:30:07 PM	PH3 valve closed
2/25/2012	11:30:07 PM	SiCl4 pre valve closed
2/25/2012	11:30:07 PM	SiCl4 post valve closed
2/25/2012	11:30:07 PM	Main Vac valve closed
2/25/2012	11:30:07 PM	Bypass valve closed
2/25/2012	11:30:07 PM	Bubbler valve closed
2/25/2012	11:30:07 PM	Helium valve opened
2/25/2012	11:30:07 PM	Helium MFC set to  500.000000
2/25/2012	11:30:07 PM	H2 MFC set to  0.000000
2/25/2012	11:30:07 PM	BCl3 MFC set to  0.000000
2/25/2012	11:30:07 PM	PH3 MFC set to  0.000000
2/25/2012	11:30:07 PM	SiCl4 MFC set to  0.000000
2/25/2012	11:30:07 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:30:07 PM	Tube furnace set to 0
2/25/2012	11:30:07 PM	Helium valve closed
2/25/2012	11:30:07 PM	H2 valve closed
2/25/2012	11:30:07 PM	BCl3 valve closed
2/25/2012	11:30:07 PM	PH3 valve closed
2/25/2012	11:30:07 PM	SiCl4 pre valve closed
2/25/2012	11:30:07 PM	SiCl4 post valve closed
2/25/2012	11:30:07 PM	Main Vac valve closed
2/25/2012	11:30:07 PM	Bypass valve closed
2/25/2012	11:30:07 PM	Bubbler valve closed
2/25/2012	11:30:07 PM	Helium MFC set to  0.000000
2/25/2012	11:30:07 PM	H2 MFC set to  0.000000
2/25/2012	11:30:07 PM	BCl3 MFC set to  0.000000
2/25/2012	11:30:07 PM	PH3 MFC set to  0.000000
2/25/2012	11:30:07 PM	SiCl4 MFC set to  0.000000
2/25/2012	11:30:07 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:30:07 PM	Tube furnace set to 0
2/25/2012	11:30:08 PM	Run finished at 11:30 PM
2/25/2012	11:30:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	11:35:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	11:35:56 PM	Recipe started at 11:35 PM
2/25/2012	11:35:56 PM	Helium valve closed
2/25/2012	11:35:56 PM	H2 valve closed
2/25/2012	11:35:56 PM	BCl3 valve closed
2/25/2012	11:35:56 PM	PH3 valve closed
2/25/2012	11:35:56 PM	SiCl4 pre valve closed
2/25/2012	11:35:56 PM	SiCl4 post valve closed
2/25/2012	11:35:56 PM	Main Vac valve closed
2/25/2012	11:35:56 PM	Bypass valve closed
2/25/2012	11:35:56 PM	Bubbler valve closed
2/25/2012	11:35:56 PM	Helium MFC set to  0.000000
2/25/2012	11:35:56 PM	H2 MFC set to  0.000000
2/25/2012	11:35:56 PM	BCl3 MFC set to  0.000000
2/25/2012	11:35:56 PM	PH3 MFC set to  0.000000
2/25/2012	11:35:56 PM	SiCl4 MFC set to  0.000000
2/25/2012	11:35:56 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:35:56 PM	Tube furnace set to 0
2/25/2012	11:35:59 PM	H2 valve closed
2/25/2012	11:35:59 PM	BCl3 valve closed
2/25/2012	11:35:59 PM	PH3 valve closed
2/25/2012	11:35:59 PM	SiCl4 pre valve closed
2/25/2012	11:35:59 PM	SiCl4 post valve closed
2/25/2012	11:35:59 PM	Main Vac valve closed
2/25/2012	11:35:59 PM	Bypass valve closed
2/25/2012	11:35:59 PM	Bubbler valve closed
2/25/2012	11:35:59 PM	Helium valve opened
2/25/2012	11:35:59 PM	Helium MFC set to  500.000000
2/25/2012	11:35:59 PM	H2 MFC set to  0.000000
2/25/2012	11:35:59 PM	BCl3 MFC set to  0.000000
2/25/2012	11:35:59 PM	PH3 MFC set to  0.000000
2/25/2012	11:35:59 PM	SiCl4 MFC set to  0.000000
2/25/2012	11:35:59 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:35:59 PM	Tube furnace set to 0
2/25/2012	11:36:02 PM	Helium valve closed
2/25/2012	11:36:02 PM	H2 valve closed
2/25/2012	11:36:02 PM	BCl3 valve closed
2/25/2012	11:36:02 PM	PH3 valve closed
2/25/2012	11:36:02 PM	SiCl4 pre valve closed
2/25/2012	11:36:02 PM	SiCl4 post valve closed
2/25/2012	11:36:02 PM	Main Vac valve closed
2/25/2012	11:36:02 PM	Bypass valve closed
2/25/2012	11:36:02 PM	Bubbler valve closed
2/25/2012	11:36:02 PM	Helium MFC set to  0.000000
2/25/2012	11:36:02 PM	H2 MFC set to  0.000000
2/25/2012	11:36:02 PM	BCl3 MFC set to  0.000000
2/25/2012	11:36:02 PM	PH3 MFC set to  0.000000
2/25/2012	11:36:02 PM	SiCl4 MFC set to  0.000000
2/25/2012	11:36:02 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:36:02 PM	Tube furnace set to 0
2/25/2012	11:36:03 PM	Run finished at 11:36 PM
2/25/2012	11:36:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/25/2012	11:46:05 PM	Recipe started at 11:46 PM
2/25/2012	11:46:05 PM	Helium valve closed
2/25/2012	11:46:05 PM	H2 valve closed
2/25/2012	11:46:05 PM	BCl3 valve closed
2/25/2012	11:46:05 PM	PH3 valve closed
2/25/2012	11:46:05 PM	SiCl4 pre valve closed
2/25/2012	11:46:05 PM	SiCl4 post valve closed
2/25/2012	11:46:05 PM	Bypass valve closed
2/25/2012	11:46:05 PM	Bubbler valve closed
2/25/2012	11:46:05 PM	Main Vac valve opened
2/25/2012	11:46:05 PM	Helium MFC set to  0.000000
2/25/2012	11:46:05 PM	H2 MFC set to  0.000000
2/25/2012	11:46:05 PM	BCl3 MFC set to  0.000000
2/25/2012	11:46:05 PM	PH3 MFC set to  0.000000
2/25/2012	11:46:05 PM	SiCl4 MFC set to  0.000000
2/25/2012	11:46:05 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:46:05 PM	Tube furnace set to 0
2/25/2012	11:46:16 PM	Run aborted at 11:46 PM
2/25/2012	11:46:16 PM	Helium valve closed
2/25/2012	11:46:16 PM	H2 valve closed
2/25/2012	11:46:16 PM	BCl3 valve closed
2/25/2012	11:46:16 PM	PH3 valve closed
2/25/2012	11:46:16 PM	SiCl4 pre valve closed
2/25/2012	11:46:16 PM	SiCl4 post valve closed
2/25/2012	11:46:16 PM	Bypass valve closed
2/25/2012	11:46:16 PM	Main Vac valve closed
2/25/2012	11:46:16 PM	Bubbler valve closed
2/25/2012	11:46:16 PM	Helium MFC set to  0.000000
2/25/2012	11:46:16 PM	H2 MFC set to  0.000000
2/25/2012	11:46:16 PM	BCl3 MFC set to  0.000000
2/25/2012	11:46:16 PM	PH3 MFC set to  0.000000
2/25/2012	11:46:16 PM	SiCl4 MFC set to  0.000000
2/25/2012	11:46:16 PM	Tube furnace set to 0
2/25/2012	11:46:30 PM	Recipe started at 11:46 PM
2/25/2012	11:46:30 PM	Helium valve closed
2/25/2012	11:46:30 PM	H2 valve closed
2/25/2012	11:46:30 PM	BCl3 valve closed
2/25/2012	11:46:30 PM	PH3 valve closed
2/25/2012	11:46:30 PM	SiCl4 pre valve closed
2/25/2012	11:46:30 PM	SiCl4 post valve closed
2/25/2012	11:46:30 PM	Bypass valve closed
2/25/2012	11:46:30 PM	Bubbler valve closed
2/25/2012	11:46:30 PM	Main Vac valve opened
2/25/2012	11:46:30 PM	Helium MFC set to  0.000000
2/25/2012	11:46:30 PM	H2 MFC set to  0.000000
2/25/2012	11:46:30 PM	BCl3 MFC set to  0.000000
2/25/2012	11:46:30 PM	PH3 MFC set to  0.000000
2/25/2012	11:46:30 PM	SiCl4 MFC set to  0.000000
2/25/2012	11:46:30 PM	Bypass solenoid MFC set to  0.000000
2/25/2012	11:46:30 PM	Tube furnace set to 0
